Description

Engineered to clean ion implanter parts with IPA and DI water. Ultrasonic cleaning is used to insure agitation of parts. Stainless Steel shell construction is used to provide compatibility and safety. Available in 150, 200 and 300 mm sizes. Custom configurations are also available, contact us for a quote.

Features 304 Stainless Steel Shell Construction 316 Stainless Steel Static Tank 316 Stainless Steel Ultrasonic Tank PVDF Cascade Rinse Tank Stainless Steel Parts Basket Remote Teflon Drain Valves All Teflon CDA & N2 Plumbing Easily Accessible Recessed EPO Multiprogrammable Timers Manual Exhaust Damper Remote Start/Stop Switches Clear PVC, Fold-Down Shields Low-Exhaust Power Shutdown Explosion Proof Station Light Teflon N2 Gun & DI Gun

Options Stainless Steel Fire Sprinkler High Intensity Ultrasonic Tank Rinse-To-Resistivity Controller Automatic Exhaust Damper System Teflon Purebond DI Water Manifold CO2 Fire Suppression System Screen/Spark Arrested Drains N2 Bubbler in Cascade Rinser Glove Wash Module Lexan MR5 Solvent Resistant Shields Chemical Fill to Liquid Level System Programmable Flow Meter Fill System

Return to Support Equipment