Description

Engineered to clean plasma etch system parts using IPA and DI water. Ultrasonic tank provides agitation to insure cleaning. All Stainless Steel shell construction for compatibility and safety. Available in 150, 200 and 300 mm sizes. Custom configurations are also available, contact us for a quote.

Features 304 Stainless Steel Shell Construction 316 Stainless Steel Static Tank 316 Stainless Steel Ultrasonic Tank PVDF Cascade Rinse Tank Stainless Steel Parts Basket Remote Teflon Drain Valves All Teflon CDA & N2 Plumbing Easily Accessible Recessed EPO Multiprogrammable Timers Manual Exhaust Damper Remote Start/Stop Switches Clear PVC, Fold-Down Shields Low-Exhaust Power Shutdown Explosion Proof Station Light Teflon N2 Gun & DI Gun Glove Wash Module

Options Stainless Steel Fire Sprinkler High Intensity Ultrasonic Tank Rinse-To-Resistivity Controller Automatic Exhaust Damper System Teflon Purebond DI Water Manifold CO2 Fire Suppression System Screen/Spark Arrested Drains N2 Bubbler in Cascade Rinser Lexan MR5 Solvent Resistant Shields Teflon IPA Gun Chemical Fill to Liquid Level System Programmable Flow Meter Fill System

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