Semi-Automated Equipment

Model 50-200

Introduction

The 50-200 semi-automated wet station represents Bold Technologies ongoing commitment to engineer new tools that will help increase production and increase process repeatability. The 50-200's transfer system safely moves wafer cassettes from chemical to rinse tanks.

The transfer system reduces operator intervention further protecting them from exposure to harsh chemicals.

The tool utilizes Bold Technologies' newly designed BT Automatic Transfer System.

Features

The 50-200's transfer system is designed to accommodate all wafer sizes. This is essential when working with 200mm and 300mm wafer sizes. And it can be designed to accommodate various multiple process types.

This system is designed to be used with an independent controller, a PLC, or with Bold Technologies' computer control system that has SECSII/GEM compliant capabilities.

The tool construction is a fully enclosed system with an automatic window for access into the process area. Optional HEPA or ULPA filters can be added to create a mini-environment in the station.

Maintenance access can be done from either the front or the rear of the station. There are no exposed metal parts further ensuring process reliability. High purity Teflon and PVDF tubing is used throughout the tool. All acid and solvent drain line are dedicated thus prolonging the life of the station.

Optional chemical dispense system can be designed into the station. This system can be hooked up to a house bulk chemical dispense module or to Bold Technologies' chemical dispense module

Other Semi-Automated Systems

Introduction

Bold Technologies specializes in customer equipment and has provided single transfer as well as multiple transfer stations to meet our customer's exact requirements. Stations featuring transfer between two, three, and four tanks with a single transfer arm is possible. Systems with more than two process tanks require computer or PLC control.

Features

Process repeatability is the most common factor in selecting a semi-automated system. These systems can repeat the exact process everytime and provide added safety to operators by keeping them away from the harsh chemistry.

Stand alone, PLC, or computer control systems can be used to control the equipment. Open, closed or enclosed styles are also available depending upon you process cleanliness requirements.

Chemical dispense with either an in-house or a Bold Technologies' chemical dispense system can be incorporated into these stations for added convenience and safety.