Manual Equipment
|
Introduction
Bold Technologies' custom manual wet stations are designed
with simplicity in mind. The stations are easy to service
and require low maintenance resulting in high uptime.
The modular design of each component allows for quick
access for cleaning or servicing.
|
|
Every stations goes through a customer approval design stage,
high quality manufacturing stage with quality control checks
throughout the process, and final testing with 18 Meg Ohm
DI water.
During final testing customers are invited to come for a source
inspection of their station.
Features
The station shell is constructed of white polypropylene.
Other construction materials that we use to meet EH&S requirements
include fire retardant polypropylene, CPVC, 304 or 316 stainless
steel.
 |
For poly shell construction, a special single-pass
extrusion welded plenums that equals a nine bead weld
maintains maximum plastic strength. Each time you lay
a weld the plastic is being heated and cooled, typically
a triple-weld is used in plenum areas, during the heating
and cooling process the plastic oxidizes becomes more
vulnerable to chemical attack and premature failure. The
extrusion weld only requires one pass thus ensuring many
years of solid performance from Bold Technologies' equipment. |
| N2 purged headcasing, sealed electrical chaseways, and
acid and solvent resistant coverings are used to protect
electrical components and process controls from the harsh
environment. Front panel switches are conveniently place
for remote start/stop and reset process control. |
 |
All process components and controls are modular enabling
our customers to quickly retrofit to meet changing process
requirements.
The station can be configured as a front access or a rear
access. In a front access station all electrical and plumbing
maintenance is done from the clean room side of the station;
a rear access station all maintenance is accomplished in the
service chase.
| Stations can be configured to accommodate
all wafer sizes with single or dual cassette capacity.
Exhaust can be configured for updraft or downdraft that
includes a manual damper. Optional automatic exhaust dampers
can be supplied; automatic dampers are used to maintain
constant air velocity. The 360 ° exhaust bezels with
adjustable slotted exhaust also improves laminar air handling
and ensures complete capture of chemical vapors. Face
and side safety shields are utilized to further protect
the operator. |
|
|