Automated Equipment Linear Transfer Automation Introduction Bold Technologies has been working closely with customers for over twenty-years to improve our high throughput linear transfer station. This system is designed with the smallest footprint possible, high throughput, reduced acid or solvent and DI water usage, and most importantly process repeatability. The linear transfer station is a total package for our your specific process. This system's modular design enables us to meet all types of processing requirements. Bold Technologies computer control system allows for total process control. Features The linear transfer station is designed with Bold Technologies' flagship computer control system. This system is a user friendly windows based operator interface. This system offers multiple recipe management, historical lot tracking, and can communicate to a host computer via an optional SECS/GEM compliant protocol. There is a load and unload station that can stage up to eight cassettes. Optional wafer cassette to cassette handling system and a SMIF transfer can be added to the station to further reduce exposure to particles. Preweight chemical dispense tanks and in situ chemical monitoring maintains chemical concentration and extends chemical life. Various top loading IPA and spin dryer technologies can be incorporated into this system to meet your process requirement. Single & Multiple Transfer Automation Introduction Single and Multiple transfer automated stations are also available. These combine the advantages of computer control and lot tracking with less complex automation. Many customers select this option because it offers advanced features without the higher price of a linear system. Features Many of the features available on linear systems are also available on the single and multiple models. These include the Windows based control software with recipe management, lot tracking and SEC II/GEM compliant communication protocol. The use of automatic windows, HEPA filtration and the enclosed design creates a mini-environment allowing for ultra-clean processing. In-tank chemical dispensing and mixing is also available for these models.

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